Surface and interfacial study of half cycle atomic layer deposited Al2O3 on black phosphorus
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Nov 01, 2015
- Source ID
- 10.1016/j.mee.2015.04.014
Entities
People
- Angelica Azcatl
- Hui Zhu
- Peide Ye
- Rafik Addou
- Robert M Wallace
- Stephen McDonnell
- Xiaoye Qin
Organizations
- Defense Advanced Research Projects Agency
- National Institute of Standards and Technology