Front-end of line and middle-of-line time-dependent dielectric breakdown reliability simulator for logic circuits
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Sep 01, 2017
- Source ID
- 10.1016/j.microrel.2017.06.038
Entities
People
- Dae-hyun Kim
- Kexin Yang
- Linda Milor
- Rui Zhang
- Taizhi Liu