Digital atomic scale fabrication an inverse Moore's Law – A path to atomically precise manufacturing

Document Details

Document Type
Pub Defense Publication
Publication Date
Nov 01, 2018
Source ID
10.1016/j.mne.2018.11.001

Entities

People

  • Ehud Fuchs
  • Erik A Henriksen
  • James H.g. Owen
  • James R. Von Ehr
  • John N. Randall
  • Joseph Lake
  • Josh Ballard

Organizations

  • Air Force Research Laboratory
  • Army Research Office
  • Defense Advanced Research Projects Agency
  • United States Department of Energy