The effects of silicon substrate thickness and annealing temperature on surface coverage for aluminum-induced crystallization of germanium films

Document Details

Document Type
Pub Defense Publication
Publication Date
May 01, 2019
Source ID
10.1016/j.mssp.2019.01.030

Entities

People

  • Elisabeth L. Mcclure
  • Seth M Hubbard

Organizations

  • Office of Naval Research
  • United States Naval Research Laboratory