Low contact-resistivity and high-uniformity Ni/Au ohmic contacts on Si nanomembranes grafted to Si substrates via low-temperature rapid thermal annealing

Document Details

Document Type
Pub Defense Publication
Publication Date
Nov 01, 2022
Source ID
10.1016/j.mssp.2022.106988

Entities

People

  • Daniel Vincent
  • Donghyeok Kim
  • Jianlong Zhou
  • Jiarui Gong
  • Jisoo Kim
  • Sang June Cho
  • Seunghwan Min
  • Shalini Lal
  • Wei Lin
  • Xin Su
  • Yuhui Ma

Organizations

  • Air Force Office of Scientific Research