Ultra-high vacuum dc magnetron sputter-deposition of 0001-textured trigonal α-Ta2C/Al2O3(0001) thin films

Document Details

Document Type
Pub Defense Publication
Publication Date
Sep 01, 2020
Source ID
10.1016/j.mtla.2020.100838

Entities

People

  • Angel Aleman
  • Hicham Zaid
  • Koki Hojo
  • Kōichi Tanaka
  • Mark S. Goorsky
  • Michael E Liao
  • Suneel Kodambaka
  • Yekan Wang

Organizations

  • Air Force Office of Scientific Research
  • Japan Student Services Organization
  • National Institutes of Health
  • National Science Foundation