Automatic beam focusing in the 2nd generation PBW line at sub-10nm line resolution
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Apr 01, 2015
- Source ID
- 10.1016/j.nimb.2014.12.066
Entities
People
- J.a. Van Kan
- Yuling Yao
Organizations
- United States Air Force