Development of ion sources: Towards high brightness for proton beam writing applications

Document Details

Document Type
Pub Defense Publication
Publication Date
Apr 01, 2015
Source ID
10.1016/j.nimb.2015.01.017

Entities

People

  • Anjam Khursheed
  • Huei Ming Tan
  • Jeroen A. Van Kan
  • Nannan Liu
  • P. Santhana Raman
  • Xinxin Xu

Organizations

  • United States Air Force