Post-implantation depth profiling using time-domain Brillouin scattering
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Feb 01, 2019
- Source ID
- 10.1016/j.nimb.2018.11.033
Entities
People
- Andrey Baydin
- Halina Krzyzanowska
- L. C. Feldman
- Norman Tolk
Organizations
- Army Research Office