Sub-λ/10 spot size in semiconductor solid immersion lens microscopy

Document Details

Document Type
Pub Defense Publication
Publication Date
Mar 01, 2014
Source ID
10.1016/j.optcom.2013.11.005

Entities

People

  • Bennett B. Goldberg
  • M. Selim Ünlü
  • Mohamadreza G. Banaee

Organizations

  • Air Force Research Laboratory
  • Intelligence Advanced Research Projects Activity

Tags

Technology Areas

  • Microelectronics