Using block copolymer architecture to achieve sub-10 nm periods

Document Details

Document Type
Pub Defense Publication
Publication Date
Jul 01, 2017
Source ID
10.1016/j.polymer.2017.06.007

Entities

People

  • E. Bryan Coughlin
  • Shuaigang Xiao
  • Song Hong
  • Thomas Paul Russell
  • Wenxu Zhang
  • Xiaohui Liu
  • Zhenbin Chen
  • Zhiwei Sun

Organizations

  • Army Research Office
  • Office of Basic Energy Sciences
  • United States Department of Energy

Tags

Technology Areas

  • Microelectronics