Selective area epitaxy by metalorganic chemical vapor deposition– a tool for photonic and novel nanostructure integration
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Jan 01, 2021
- Source ID
- 10.1016/j.pquantelec.2020.100304
Entities
People
- Chun Yung Chi
- Dawei Ren
- Hanmin Zhao
- Hyung Joon Chu
- Maoqing Yao
- Mitchell Dreiske
- P. Daniel Dapkus
- Rijuan Li
- Ryan Stevenson
- Sang Jun Choi
- Ting Wei Yeh
- Yenting Lin
- Yoshitake Nakajima
Organizations
- Air Force Office of Scientific Research
- Defense Advanced Research Projects Agency
- National Science Foundation
- Office of Naval Research