Straightforward fabrication of sub-10 nm nanogap electrode pairs by electron beam lithography

Document Details

Document Type
Pub Defense Publication
Publication Date
Sep 01, 2022
Source ID
10.1016/j.precisioneng.2022.06.004

Entities

People

  • Aditya Mishra
  • Jason D. Slinker
  • Reema Mcmullen

Organizations

  • Office of Naval Research

Tags

Technology Areas

  • Directed Energy
  • Microelectronics
  • Microelectronics - Graphene