Determination of sample surface topography using electron back-scatter diffraction patterns

Document Details

Document Type
Pub Defense Publication
Publication Date
Jul 01, 2016
Source ID
10.1016/j.scriptamat.2016.03.032

Entities

People

  • M. Chapman
  • M. De Graef
  • P.g. Callahan

Organizations

  • Air Force Office of Scientific Research
  • Air Force Research Laboratory
  • Carnegie Mellon University

Tags

Technology Areas

  • Microelectronics