Piezoelectric aluminum nitride MEMS annular dual contour mode filter

Document Details

Document Type
Pub Defense Publication
Publication Date
Feb 01, 2007
Source ID
10.1016/j.sna.2006.04.032

Entities

People

  • Albert P. Pisano
  • Carolyn D. White
  • Gianluca Piazza
  • Muthu B.j. Wijesundara
  • Philip J. Stephanou

Organizations

  • Defense Advanced Research Projects Agency