Encapsulation of ionic polymer-metal composite (IPMC) sensors with thick parylene: Fabrication process and characterization results
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Sep 01, 2014
- Source ID
- 10.1016/j.sna.2014.05.013
Entities
People
- Hong Lei
- Wen Li
- Xiaobo Tan
Organizations
- National Science Foundation
- Office of Naval Research