Encapsulation of ionic polymer-metal composite (IPMC) sensors with thick parylene: Fabrication process and characterization results

Document Details

Document Type
Pub Defense Publication
Publication Date
Sep 01, 2014
Source ID
10.1016/j.sna.2014.05.013

Entities

People

  • Hong Lei
  • Wen Li
  • Xiaobo Tan

Organizations

  • National Science Foundation
  • Office of Naval Research