Electrical contact resistance force sensing in SOI-DRIE MEMS
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Jan 01, 2018
- Source ID
- 10.1016/j.sna.2017.12.010
Entities
People
- Don L. Devoe
- Hugh A. Bruck
- Scott G. Rauscher
Organizations
- National Science Foundation
- United States Army Research Laboratory