A digital force-to-rebalance scheme for high-frequency bulk-acoustic-wave micro-gyroscopes

Document Details

Document Type
Pub Defense Publication
Publication Date
Oct 01, 2020
Source ID
10.1016/j.sna.2020.112181

Entities

People

  • Chong Li
  • Farrokh Ayazi
  • Haoran Wen
  • Hua Chen

Organizations

  • Defense Advanced Research Projects Agency