Mechanical trimming with focused ion beam for permanent tuning of MEMS dual-mass gyroscope

Document Details

Document Type: Pub Defense Publication
Publication Date: Oct 01, 2020
Source ID: 10.1016/j.sna.2020.112189

Entities

People

Alexandra Efimovskaya
Andrei M. Shkel
Danmeng Wang

Organizations

Defense Advanced Research Projects Agency