A temperature compensated biaxial eFM accelerometer in Epi-seal process

Document Details

Document Type
Pub Defense Publication
Publication Date
Oct 01, 2021
Source ID
10.1016/j.sna.2021.112860

Entities

People

  • Farrokh Ayazi
  • Gabrielle D. Vukasin
  • Hyun-Keun Kwon
  • Seungyong Shin
  • Thomas W. Kenny

Organizations

  • Defense Advanced Research Projects Agency
  • National Science Foundation
  • National Sleep Foundation
  • Swiss National Science Foundation