Modelling analysis for design of microshutters with new electrode configuration
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Aug 01, 2022
- Source ID
- 10.1016/j.sna.2022.113661
Entities
People
- Alexander S. Kutyrev
- Carl A. Kotecki
- Kyowon Kim
- Matthew A. Greenhouse
- Meng-ping Chang
- Ming Ke
- Rainer Fettig
- Regis P. Brekosky
- Yongjie Hu
Organizations
- Alfred P. Sloan Foundation
- American Society of Mechanical Engineers
- Harvard University
- Massachusetts Institute of Technology
- National Aeronautics and Space Administration
- National Science Foundation
- United States Air Force