Effect of SiNx gate insulator thickness on electrical properties of SiNx/In0.17Al0.83N/AlN/GaN MIS–HEMTs

Document Details

Document Type
Pub Defense Publication
Publication Date
Apr 01, 2015
Source ID
10.1016/j.sse.2014.12.025

Entities

People

  • B.p. Downey
  • D. S. Katzer
  • D.j. Meyer
  • M. Pan
  • T.m. Marron
  • Xiangyu Gao

Organizations

  • Office of Naval Research

Tags

Technology Areas

  • Microelectronics