Selective thermal neutron transmutation doping with Gd masks in GaN semiconductors

Document Details

Document Type
Pub Defense Publication
Publication Date
Jan 01, 2023
Source ID
10.1016/j.sse.2022.108510

Entities

People

  • Jae W. Kwon
  • Jeongwoo Kim
  • Lowell Crow
  • Matthias Frontzek

Organizations

  • ARPA-E
  • Defense Advanced Research Projects Agency

Tags

Technology Areas

  • Microelectronics