Comparison of the capabilities of rotating-analyzer and rotating-compensator ellipsometers by measurements on a single system

Document Details

Document Type
Pub Defense Publication
Publication Date
May 01, 2004
Source ID
10.1016/j.tsf.2003.12.037

Entities

People

  • D.e. Aspnes
  • Takato Mori

Organizations

  • Ministry of Education, Culture, Sports, Science and Technology
  • Office of Naval Research