Developing an epitaxial growth process for ZnO by MOCVD using real-time spectroscopic ellipsometry
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Feb 01, 2011
- Source ID
- 10.1016/j.tsf.2010.12.071
Entities
People
- E.j. Adles
Organizations
- Defense Advanced Research Projects Agency
- University of Florida