Low resistivity contacts to plasma etched Mg-doped GaN using very low power inductively coupled plasma etching
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Mar 01, 2011
- Source ID
- 10.1016/j.tsf.2011.01.276
Entities
People
- A. Baharin
- B.d. Nener
- G. Parish
- R.s. Pinto
- Umesh K. Mishra
Organizations
- Defense Advanced Research Projects Agency
- Office of Naval Research