Using a slit doser to probe gas dynamics during Al2O3 atomic layer deposition and to fabricate laterally graded Al2O3 layers

Document Details

Document Type
Pub Defense Publication
Publication Date
Mar 01, 2011
Source ID
10.1016/j.tsf.2011.01.285

Entities

People

  • Dragos Seghete
  • Francois H. Fabreguette
  • Steven M. George

Organizations

  • Air Force Office of Scientific Research