Characterization of hafnium oxide resistive memory layers deposited on copper by atomic layer deposition
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Jul 01, 2014
- Source ID
- 10.1016/j.tsf.2014.04.084
Entities
People
- B.d. Briggs
- K.d. Leedy
- N.c. Cady
- S.m. Bishop
Organizations
- Air Force Research Laboratory