Optical characterization of nanocrystalline boron nitride thin films grown by atomic layer deposition

Document Details

Document Type
Pub Defense Publication
Publication Date
Nov 01, 2014
Source ID
10.1016/j.tsf.2014.09.065

Entities

People

  • J. Matthew Mann
  • Jodie Shoaf
  • Merle Hamilton
  • Michael Snure
  • Qing Paduano

Organizations

  • Air Force Office of Scientific Research