Growth and characterization of III-N ternary thin films by plasma assisted atomic layer epitaxy at low temperatures

Document Details

Document Type
Pub Defense Publication
Publication Date
Aug 01, 2015
Source ID
10.1016/j.tsf.2015.04.068

Entities

People

  • Charles. R. Eddy Jr.
  • Jennifer K Hite
  • Neeraj Nepal
  • Virginia R. Anderson

Organizations

  • Office of Naval Research