Micron thick Gd2O3 films for GaN/AlGaN metal–oxide–semiconductor heterostructures

Document Details

Document Type
Pub Defense Publication
Publication Date
Aug 01, 2015
Source ID
10.1016/j.tsf.2015.04.072

Entities

People

  • Daniel A. Grave
  • Douglas E. Wolfe
  • Joshua A. Robinson

Organizations

  • Defense Threat Reduction Agency

Tags

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene