Characterization of IrOx sputtering for IrO2 and IrO2/Pt bottom-electrode piezoelectric micro-electro-mechanical systems applications

Document Details

Document Type
Pub Defense Publication
Publication Date
Sep 01, 2017
Source ID
10.1016/j.tsf.2017.07.024

Entities

People

  • Daniel M. Potrepka
  • Glen R. Fox
  • Haibo Yu
  • Manuel Rivas
  • Mark Aindow
  • Ronald G. Polcawich

Organizations

  • United States Army

Tags

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene
  • Microelectronics - Microelectromechanical Systems