Dielectric barrier layers by low-temperature plasma-enhanced atomic layer deposition of silicon dioxide
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Mar 01, 2018
- Source ID
- 10.1016/j.tsf.2018.01.019
Entities
People
- Kenneth E. Goodson
- Michael T. Barako
- Shilpi Roy-panzer
- Thomas W. Kenny
- Timothy S. English
Organizations
- Air Force Office of Scientific Research