Substrate and annealing temperature dependent electrical resistivity of sputtered titanium nitride thin films

Document Details

Document Type
Pub Defense Publication
Publication Date
Sep 01, 2018
Source ID
10.1016/j.tsf.2018.07.001

Entities

People

  • B.t. Kearney
  • Battogtokh Jugdersuren
  • J.c. Culbertson
  • P.a. Desario
  • Xiao Liu

Organizations

  • Office of Naval Research