Investigation of strain and stoichiometry of epitaxial titanium nitride on sapphire

Document Details

Document Type
Pub Defense Publication
Publication Date
Mar 01, 2020
Source ID
10.1016/j.tsf.2020.137832

Entities

People

  • A.m. Urbas
  • Amber Reed
  • H.a. Smith
  • K. Mahalingam
  • K.g. Eyink
  • R.l. Adams
  • S. Elhamri
  • T.c. Back
  • Z.j. Biegler

Organizations

  • Air Force Office of Scientific Research