Deposition of zirconium oxide using atmospheric pressure plasma enhanced chemical vapor deposition with various precursors

Document Details

Document Type
Pub Defense Publication
Publication Date
Sep 01, 2021
Source ID
10.1016/j.tsf.2021.138815

Entities

People

  • D. Eitan Barlaz
  • D. N. Ruzic
  • Daniel V Krogstad
  • Dhruval Patel
  • Lucia Bónová
  • Santanu Chaudhuri
  • Zachary Jeckell

Organizations

  • Strategic Environmental Research and Development Program