Controlled spalling of (100)-oriented GaAs with a nanoimprint lithography interlayer for thin-film layer transfer without facet formation

Document Details

Document Type
Pub Defense Publication
Publication Date
Jan 01, 2022
Source ID
10.1016/j.tsf.2021.139049

Entities

People

  • Aaron J Ptak
  • Anna K. Braun
  • Corinne E Packard
  • San Theingi
  • William E. Mcmahon

Organizations

  • Air Force Research Laboratory
  • National Renewable Energy Laboratory
  • National Science Foundation
  • United States Department of Energy