Parallel preparation of plan-view transmission electron microscopy specimens by vapor-phase etching with integrated etch stops
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Jul 01, 2016
- Source ID
- 10.1016/j.ultramic.2016.04.003
Entities
People
- Ai Leen Koh
- Ann F. Marshall
- J. Provine
- Thomas W. Kenny
- Timothy S. English
Organizations
- Defense Advanced Research Projects Agency
- National Science Foundation
- United States Department of Defense