Advanced detector signal acquisition and electron beam scanning for high resolution SEM imaging

Document Details

Document Type
Pub Defense Publication
Publication Date
Dec 01, 2018
Source ID
10.1016/j.ultramic.2018.08.025

Entities

People

  • Jean Charles Stinville
  • McLean P. Echlin
  • Samantha Daly
  • Tresa M. Pollock
  • William C. Lenthe
  • Zhe Chen

Organizations

  • Air Force Office of Scientific Research
  • Office of Naval Research

Tags

Technology Areas

  • Directed Energy
  • Microelectronics