The exit-wave power-cepstrum transform for scanning nanobeam electron diffraction: robust strain mapping at subnanometer resolution and subpicometer precision

Document Details

Document Type
Pub Defense Publication
Publication Date
Jul 01, 2020
Source ID
10.1016/j.ultramic.2020.112994

Entities

People

  • Darrell G. Schlom
  • David A. Muller
  • Elliot Padgett
  • Eric Langenberg
  • Megan E. Holtz
  • Paul Cueva
  • Yu-tsun Shao

Organizations

  • Air Force Office of Scientific Research
  • National Science Foundation
  • United States Department of Energy

Tags

Technology Areas

  • Microelectronics