Electron-beam chemistry in graphene - Effect of environmental SEM parameters on patterning and defect engineering

Document Details

Document Type
Pub Defense Publication
Publication Date
Jan 01, 2023
Source ID
10.1016/j.vacuum.2022.111686

Entities

People

  • Ahmad E Islam
  • Benji Maruyama
  • I-Hsuan Kao
  • Jennifer Carpena-Núñez
  • Jyoti Katoch
  • Michael A Susner
  • Rahul Rao
  • Ryan Muzzio
  • Ryan Selhorst

Organizations

  • Air Force Office of Scientific Research
  • National Science Foundation

Tags

Technology Areas

  • Directed Energy
  • Microelectronics
  • Microelectronics - Graphene