Electron-beam chemistry in graphene - Effect of environmental SEM parameters on patterning and defect engineering
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Jan 01, 2023
- Source ID
- 10.1016/j.vacuum.2022.111686
Entities
People
- Ahmad E Islam
- Benji Maruyama
- I-Hsuan Kao
- Jennifer Carpena-Núñez
- Jyoti Katoch
- Michael A Susner
- Rahul Rao
- Ryan Muzzio
- Ryan Selhorst
Organizations
- Air Force Office of Scientific Research
- National Science Foundation