Marks for SCALPEL® tool optics optimization

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 01, 2000
Source ID
10.1016/s0167-9317(00)00321-x

Entities

People

  • A. Kornblit
  • C. Biddick
  • F. Klemens
  • G.m. Gallatin
  • I. Kizilyalli
  • J. Felker
  • J. Kraus
  • J.a. Liddle
  • M. Blakey
  • M. Mkrtchyan
  • N. Layadi
  • P.a. Orphanos
  • R.c. Farrow
  • S. Merchant
  • W.k. Waskiewicz

Organizations

  • Defense Advanced Research Projects Agency