Atomic Layer Deposition as the Enabler for the Metastable Semiconductor InN and Its Alloys

Document Details

Document Type
Pub Defense Publication
Publication Date
Sep 19, 2023
Source ID
10.1021/acs.cgd.3c00775

Entities

People

  • Charles R. Eddy
  • Chih-Wei Hsu
  • Henrik Pedersen
  • J. Woodward
  • Neeraj Nepal

Organizations

  • Division of Materials Research
  • Knut and Alice Wallenberg Foundation
  • Linköping University
  • Office of Naval Research
  • United States Naval Research Laboratory

Tags

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene