Atomic Layer Deposition as the Enabler for the Metastable Semiconductor InN and Its Alloys
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Sep 19, 2023
- Source ID
- 10.1021/acs.cgd.3c00775
Entities
People
- Charles R. Eddy
- Chih-Wei Hsu
- Henrik Pedersen
- J. Woodward
- Neeraj Nepal
Organizations
- Division of Materials Research
- Knut and Alice Wallenberg Foundation
- Linköping University
- Office of Naval Research
- United States Naval Research Laboratory