MOCVD Growth of Thick β-(Al)GaO Films with Fast Growth Rates

Document Details

Document Type
Pub Defense Publication
Publication Date
Aug 31, 2023
Source ID
10.1021/acs.cgd.3c00779

Entities

People

  • A F M Anhar Uddin Bhuiyan
  • Dong Su Yu
  • Hongping Zhao
  • Hsien Lien Huang
  • Jinwoo Hwang
  • Lingyu Meng

Organizations

  • Air Force Office of Scientific Research
  • Division of Electrical, Communications & Cyber Systems
  • Ohio State University
  • Semiconductor Research Corporation