Enhanced Quality CVD-Grown Graphene via a Double-Plateau Copper Surface Planarization Methodology

Document Details

Document Type
Pub Defense Publication
Publication Date
Oct 16, 2017
Source ID
10.1021/acs.cgd.7b00687

Entities

People

  • Christos Dimitrakopoulos
  • Derek Demaree
  • Joshua T. Smith
  • Mark H Griep
  • Satoshi Oida
  • Tomoko Sano
  • Travis M. Tumlin

Organizations

  • Defense Advanced Research Projects Agency
  • International Business Machines Corporation (Armonk, NY)
  • United States Army Research Laboratory

Tags

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene