Low-Pressure Chemical Vapor Deposition of In2O3 Films on Off-Axis c-Sapphire Substrates

Document Details

Document Type
Pub Defense Publication
Publication Date
Jan 24, 2019
Source ID
10.1021/acs.cgd.8b01924

Entities

People

  • Hongping Zhao
  • Jared Johnson
  • Jinwoo Hwang
  • Md Rezaul Karim
  • Menglin Zhu
  • Zixuan Feng

Organizations

  • Air Force Office of Scientific Research
  • Division of Materials Research
  • Ohio State University