Synthesis and Characterization of BiFeO3 Thin Films for Multiferroic Applications by Radical Enhanced Atomic Layer Deposition
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Oct 22, 2015
- Source ID
- 10.1021/acs.chemmater.5b02162
Entities
People
- Calvin D. Pham
- Jane P. Chang
- Jeffrey T. Chang
- Mark A. Zurbuchen
Organizations
- Defense Advanced Research Projects Agency
- University of California, Los Angeles