A Hybrid Chemo-/Grapho-Epitaxial Alignment Strategy for Defect Reduction in Sub-10 nm Directed Self-Assembly of Silicon-Containing Block Copolymers
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Dec 12, 2016
- Source ID
- 10.1021/acs.chemmater.6b03633
Entities
People
- Andrew M. Dinhobl
- Austin P. Lane
- Christopher J. Ellison
- Christopher M Bates
- Diane Hymes
- Grant Willson
- Gregory Blachut
- Michael J. Maher
- Roel Gronheid
- Stephen M. Sirard
- William J. Durand
- Yasunobu Someya
- Yusuke Asano
Organizations
- Army Research Office
- Association of Science and Technology Centers
- Division of Electrical, Communications & Cyber Systems
- Division of Engineering Education & Centers
- International Business Machines Corporation (Armonk, NY)
- Interuniversity Microelectronics Centre
- Lam Research
- Nissan Chemical
- Robert A. Welch Foundation
- University of California, Santa Barbara
- University of Texas at Austin