Configurational Entropy of Adlayers in Atomic Layer Deposition
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Jun 29, 2017
- Source ID
- 10.1021/acs.chemmater.6b04829
Entities
People
- Lei Shi
- Parag Banerjee
- Yoon Myung
- Zhaonan Liu
- Zhengning Gao
Organizations
- Army Research Office
- United States Department of Energy
- Washington University in St. Louis