Configurational Entropy of Adlayers in Atomic Layer Deposition

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 29, 2017
Source ID
10.1021/acs.chemmater.6b04829

Entities

People

  • Lei Shi
  • Parag Banerjee
  • Yoon Myung
  • Zhaonan Liu
  • Zhengning Gao

Organizations

  • Army Research Office
  • United States Department of Energy
  • Washington University in St. Louis