Impact of Growth Conditions on the Phase Selectivity and Epitaxial Quality of TiO2 Films Grown by the Plasma-Assisted Atomic Layer Deposition

Document Details

Document Type
Pub Defense Publication
Publication Date
May 15, 2019
Source ID
10.1021/acs.chemmater.8b05282

Entities

People

  • Charles. R. Eddy Jr.
  • David R. Boris
  • Jaime A. Freitas Jr.
  • Jason R. Avila
  • Neeraj Nepal
  • S. B. Qadri
  • Scott G. Walton
  • Virginia D. Wheeler

Organizations

  • American Society for Engineering Education
  • Office of Naval Research
  • United States Naval Research Laboratory